Abstract: As a key device of the pulsed power drive source, the operating characteristics of the high-power gas switch largely determine the application capability of the system. In this paper, a ...
Abstract: In integrated circuits (IC), Ta/TaN is the most commonly used copper interconnect liner/barrier layer. As technology nodes advance, copper interconnect dimensions continue to shrink, leading ...
Some results have been hidden because they may be inaccessible to you
Show inaccessible results
Feedback